Your browser does not fully support modern features. Please upgrade for a smoother experience.
Submitted Successfully!
Thank you for your contribution! You can also upload a video entry or images related to this topic. For video creation, please contact our Academic Video Service.
Version Summary Created by Modification Content Size Created at Operation
1 handwiki Vivi Li -- 1326 2022-11-18 01:39:09

Video Upload Options

We provide professional Academic Video Service to translate complex research into visually appealing presentations. Would you like to try it?
No, upload directly Yes
Cite
If you have any further questions, please contact Encyclopedia Editorial Office.
HandWiki. Plasma-Enhanced Chemical Vapor Deposition. Encyclopedia. Available online: https://encyclopedia.pub/entry/35260 (accessed on 25 September 2026).
HandWiki. Plasma-Enhanced Chemical Vapor Deposition. Encyclopedia. Available at: https://encyclopedia.pub/entry/35260. Accessed September 25, 2026.
HandWiki. "Plasma-Enhanced Chemical Vapor Deposition" Encyclopedia, https://encyclopedia.pub/entry/35260 (accessed September 25, 2026).
HandWiki. (2022, November 18). Plasma-Enhanced Chemical Vapor Deposition. In Encyclopedia. https://encyclopedia.pub/entry/35260
HandWiki. "Plasma-Enhanced Chemical Vapor Deposition." Encyclopedia. Web. 18 November, 2022.
Plasma-Enhanced Chemical Vapor Deposition
Edit
The content is sourced from: https://handwiki.org/wiki/Chemistry:Plasma-enhanced_chemical_vapor_deposition

Plasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creation of a plasma of the reacting gases. The plasma is generally created by radio frequency (RF) (alternating current (AC)) frequency or direct current (DC) discharge between two electrodes, the space between which is filled with the reacting gases.

thin films plasma vapor deposition

References

  1. "First-Hand:The Birth of Glow Discharge Chemistry (aka PECVD) - Engineering and Technology History Wiki" (in en). 17 March 2015. http://ethw.org/First-Hand:The_Birth_of_Glow_Discharge_Chemistry_(aka_PECVD). 
  2. Sterling and Swann. "Perfectionnements aux méthodes de formation de couches" (in en). https://bases-brevets.inpi.fr/en/document-en/FR1442502/publications.html. 
  3. Sterling and Swann, Improvements in or relating to a method of forming a layer of an inorganic compound, https://patents.google.com/patent/GB1104935A/en 
  4. Sterling and Swann, Method of forming silicon oxide coatings in an electric discharge, https://patents.google.com/patent/US3655438A/en 
  5. Sterling, H.F; Swann, R.C.G (1965-08-01). "Chemical vapour deposition promoted by r.f. discharge" (in en). Solid-State Electronics 8 (8): 653–654. doi:10.1016/0038-1101(65)90033-X. ISSN 0038-1101. Bibcode: 1965SSEle...8..653S.  https://dx.doi.org/10.1016%2F0038-1101%2865%2990033-X
  6. Ay and Aydinli. Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides. Optical Materials (2004) vol. 26 (1) pp. 33-46
  7. Albers et al. Reduction of hydrogen induced losses in PECVD-SiOxNy optical waveguides in the near infrared. Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE (1995) vol. 2 pp. 88-89 vol. 2
  8. G. Tellez et al., INFRARED CHARACTERIZATION OF SiN FILMS ON Si FOR HIGH SPEED ELECTRONICS APPLICATIONS. MASTER OF SCIENCE IN APPLIED PHYSICS, Naval Postgraduate School, Monterey, California, USA (2004)
  9. El amrani, A.; Menous, I.; Mahiou, L.; Tadjine, R.; Touati, A.; Lefgoum, A. (2008-10-01). "Silicon nitride film for solar cells". Renewable Energy 33 (10): 2289–2293. doi:10.1016/j.renene.2007.12.015.  https://dx.doi.org/10.1016%2Fj.renene.2007.12.015
More
©Text is available under the terms and conditions of the Creative Commons-Attribution ShareAlike (CC BY-SA) license; additional terms may apply. By using this site, you agree to the Terms and Conditions and Privacy Policy.
Upload a video for this entry
Information
Subjects: Others
Contributor MDPI registered users' name will be linked to their SciProfiles pages. To register with us, please refer to https://encyclopedia.pub/register :
HandWiki
View Times: 1.1K
Entry Collection: HandWiki
Revision: 1 time (View History)
Update Date: 18 Nov 2022
Table of Contents
    Notice
    You are not a member of the advisory board for this topic. If you want to update advisory board member profile, please contact office@encyclopedia.pub.
    OK
    Confirm
    Only members of the Encyclopedia advisory board for this topic are allowed to note entries. Would you like to become an advisory board member of the Encyclopedia?
    Yes
    No
    ${ textCharacter }/${ maxCharacter }
    Submit
    Cancel
    There is no comment~
    ${ textCharacter }/${ maxCharacter }
    Submit
    Cancel
    ${ selectedItem.replyTextCharacter }/${ selectedItem.replyMaxCharacter }
    Submit
    Cancel
    Confirm
    Are you sure to Delete?
    Yes No
    Academic Video Service
    Feedback