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Song, J.; Park, S.; Lee, K.; Bae, J.; Kwon, S.; Cho, C.; Chung, S. FAB Digital Twin implementation. Encyclopedia. Available online: https://encyclopedia.pub/entry/51319 (accessed on 07 July 2024).
Song J, Park S, Lee K, Bae J, Kwon S, Cho C, et al. FAB Digital Twin implementation. Encyclopedia. Available at: https://encyclopedia.pub/entry/51319. Accessed July 07, 2024.
Song, Jinwoo, Sanghyeon Park, Kyuhyup Lee, Jinhyun Bae, Soonwook Kwon, Chung-Suk Cho, Suwan Chung. "FAB Digital Twin implementation" Encyclopedia, https://encyclopedia.pub/entry/51319 (accessed July 07, 2024).
Song, J., Park, S., Lee, K., Bae, J., Kwon, S., Cho, C., & Chung, S. (2023, November 09). FAB Digital Twin implementation. In Encyclopedia. https://encyclopedia.pub/entry/51319
Song, Jinwoo, et al. "FAB Digital Twin implementation." Encyclopedia. Web. 09 November, 2023.
FAB Digital Twin implementation
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With the advancement of state-of-the-art technologies, the semiconductor industry plays a key role as an essential component in the manufacture of various electronic products. Since the manufacturing of a semiconductor goes through very sophisticated and complex processes, efficient and accurate work and management are essential in the design, construction, and operation stages of the semiconductor fabrication (FAB) plant.

extended reality (XR) augmented reality (AR) building information modeling (BIM) fabrication facility (FAB)

1. Introduction

With the development of the fourth industrial revolution and state-of-the-art technology, the semiconductor industry plays a key role in modern society as an essential component in the manufacture of various electronic products. The manufacturing of a semiconductor involves very sophisticated and complex processes, which require highly accurate design, construction, and maintenance. Accordingly, efficient and accurate work and management are essential in the design, construction, and operation stages of the semiconductor plant [1].
Recently, the combined application of building information modeling (BIM) and augmented reality (AR) technology has gained increased attention in the semiconductor plant industry. BIM is a technology that integrates the management of architectural information with digital 3D models, having made a significant contribution to improving productivity and efficiency in the building and construction sectors [2][3][4][5]. AR, on the other hand, is a technology that provides a realistic experience to users by adding virtual information to the real environment. In the recent building industry, BIM and AR are increasingly used in virtual design, construction, operation and maintenance, and safety management, with related research being actively carried out [6][7][8][9][10]. Lately, research using BIM data is gaining traction in the field of semiconductor fabrication (FAB) facilities [10][11]; however, the application of related technology and research are deemed relatively lacking in the semiconductor industry field.
Combining BIM and AR in a semiconductor plant offers many advantages. First, by visualizing the BIM model into AR, designers and field personnel can connect real-time space and design information to perform work, thereby improving design consistency and work accuracy [12][13][14]. Second, visual expression using AR helps understanding complex processes and detecting errors. Workers can use AR to simulate equipment usage or installation processes virtually and prevent errors in advance [15][16][17]. Moreover, workers can visually identify and implement work instructions or safety procedures through AR [18][19]. This can contribute to improving work efficiency and safety significantly.
Detailed design and construction, as well as accurate operating instructions, play a key role in the semiconductor manufacturing process. The benefits through the combined application of BIM and AR have a major impact on the work process and management of semiconductor plants. Moreover, the combined BIM and AR offers new opportunities to meet the requirements for the overall process of the semiconductor plant and to support onsite work and management efficiently and accurately.

2. BIM Data Verification and Management Using AR Technology

In performing the existing work processes, the need for technology to increase work efficiency by improving problems, such as increased work time and occurrence of human errors, has increased. Through intuitive transmission of information, AR technology can be effectively utilized in establishing a framework for site information transmission [20]. Recently, research is on the rise that improves project efficiency by using AR technologies and BIM data that enable designers, engineers, managers, and other stakeholders to collaborate and share site information during the design, construction, and maintenance stages.
Moon et al. [21] applied non-marker-based AR technology to conduct research on improving the efficiency of construction structure maintenance. Shin et al. [22] conducted research on an AR-based underground facility management system by converting the image and property information of the BIM model to IFC format and by using Broadcast-RTK for improving location accuracy. Heo et al. [23] used BIM architecture data to propose an architectural geometry information visualization technique that enables immersive visualization in the AR environment. Further, the authors conducted research on how to visualize the internal geometry information of a building using marker interaction and slice cut function.
Wang et al. [24] fused BIM and AR technology to propose a facility risk assessment and management system that enables facility managers to choose maintenance policy for a single piece of equipment and to determine maintenance priorities for equipment components during the early operation and maintenance stage. May et al. [25] proposed a BIM-based AR defect management (BIM-ARDM) system that improved inspection performance of defect management through AR visualization and eye tracking as well as head tracking data for the identification of work defect during construction inspection.
Analysis of research trends related to BIM data verification and management using AR shows an increasing trend for research on integrating BIM data and AR to enhance the efficiency and accuracy of facility management. To that end, virtual objects were projected into real facilities, visualization and interaction functions were developed, and predictive maintenance as well as disruption prevention were made possible.

3. Compatibility Analysis of AR and IT Technology

During site inspection activities that commonly include quality control inspections, safety check, etc. for ongoing construction works or structures, site workers have the inconvenience of having to be familiar with several inspection information in advance, such as design, specifications, and inspection details. Additional problems associated with traditional site inspection work include the inconvenience of manually carrying inspection-related documents, errors that may occur during inspection due to handwriting of inspected items, and concerns about losing or damaging inspection worksheets. In order to solve these inefficiencies and to eliminate human errors while carrying out inspection activities, several studies have been conducted recently to propose efficient and accurate compatibility verification during site quality inspections using AR and mobile devices, such as smartphones or tablets.
Oliver et al. [26] conducted research on three-dimensional compatibility testing based on a new two-stage depth mapping algorithm for an RGB-D camera that merges camera poses and image depths into real-time consistent 3D models. Lee et al. [27] performed a study on accelerating the compatibility review approach using point data and AR technology to integrate real-world models and 3D design models. Pierre et al. [28] proposed a solution that matches 3D correspondents with structures detected for anchor-plate-based pose estimation and image enlargement. Jad et al. [29] suggested that when accuracy is of significance (i.e., less than two inches), the immersive AR can be used effectively in buildings to verify whether elements built on a more accurate but resource-intensive reality capture technology comply with BIM. Finally, Loris et al. [30] suggested in their research the use of AR technology to detect design deviations and verified the assumption that AR tools can be effectively adopted as an alternative to the technical drawing and CAD systems, allowing users to easily detect design discrepancies between the 3D model and the corresponding physical prototype.
Analysis of AR and IT technology-based compatibility related research trends revealed that most of the existing research focuses on AR applications in conjunction with 3D models within general construction activities. However, research on enhancing the compatibility precision between physical inspection models and virtual objects, taking into account the actual site characteristics for AR application, was found to be lacking. Moreover, the direct application of this approach was known to be limited considering the characteristics of common FAB sites.

References

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  3. Kang, T.W.; Hong, C.H. GIS-based BIM Object Visualization System Architecture Design using Open source BIM Server Cost-Effectively. J. Korea Spat. Inf. Soc. 2014, 22, 45–53.
  4. Yoon, S.-W.; Kim, S.-A.; Choi, J.-M.; Keum, D.-Y.; Jo, C.-W. A Proposal for Using BIM Model Created in Design to Construction Phase—Case Study on preconstruction adopting BIM. J. KIBIM 2015, 5, 1–10.
  5. Jo, Y.-H.; Lee, J.-S.; Ham, N.-H.; Kim, J.-J. Bim Strategy Plan through Domestic Construction Companies BIM Project Case Analysis—Focused on the BIM USE of the project from 2009 to 2015. J. KIBIM 2016, 6, 1–11.
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  11. Lee, S.-W.; Lee, K.-S.; Choi, S.-I.; Ryu, S.-C.; Park, J.-S. AR system for FAB construction management using BIM data under fast track condition. J. KIBIM 2022, 12, 1–18.
  12. Lee, J.-G.; Choi, M.-J.; Lim, Y.-J.; Seo, J.-O. Comparative Analysis of Visual Presentation and User Acceptability of Virtual/Augmented Reality Application for Architectural Design Review. J. KIBIM 2019, 9, 1–9.
  13. Zhang, J.-S.; Zhao, L.-H.; Cui, Y.-H.; Ren, G.-Q.; Li, H.-J. Code compliance checking of structural design based on BIM model. J. Graph. 2021, 42, 133.
  14. Meng, S.; Yang, B.; Wang, X. Research on integrated design of modular steel structure container buildings based on BIM. Adv. Civ. Eng. 2022, 2022, 4574676.
  15. Chen, H.-M.; Huang, P.-H. 3D AR-based modeling for discrete-event simulation of transport operations in construction. Autom. Constr. 2013, 33, 123–136.
  16. Kim, H.; Kang, L. Development of Pre-construction Verification System using AR-based Drawings Object. LHI J. Land Hous. Urban Aff. 2020, 11, 93–101.
  17. Mohammad, R.; Fan, M.; Yu, C. Advanced visualization and simulation techniques for modern construction management. Indoor Built Environ. 2014, 23, 665–674.
  18. Li, X.; Yi, W.; Chi, H.-L.; Wang, X.; Chan, A.P.C. A critical review of virtual and augmented reality (VR/AR) applications in construction safety. Autom. Constr. 2018, 86, 150–162.
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  30. Loris, B.; Marino, E. An augmented reality tool to detect design discrepancies: A comparison test with traditional methods. In Augmented Reality, Virtual Reality, and Computer Graphics, Proceedings of the 6th International Conference, AVR 2019, Santa Maria al Bagno, Italy, 24–27 June 2019; Proceedings, Part II 6; Springer International Publishing: Cham, Switzerland, 2019.
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