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Thermal Annealing: History
Please note this is an old version of this entry, which may differ significantly from the current revision.
Contributor: Jack Zhong

Thermal annealing is a controlled heat treatment in which a material is held at an elevated temperature, normally below its melting point, for a defined time and then cooled, so that its microstructure relaxes towards a state of lower free energy. In cold-worked metals and welded joints it relieves residual stress and homogenises segregation, and further heating drives recovery, recrystallisation and grain growth [2]. In thin films and semiconductors the same step lowers defect densities and restores crystalline order, with rapid thermal annealing chosen when a short high-temperature excursion is needed to limit unwanted diffusion [1]. Annealing is also applied to solution-deposited oxides and halides, where it converts an as-deposited amorphous or poorly ordered layer into the crystalline phase that carries the target property [3], and to polymers, where it raises chain orientation and the degree of crystallinity [4]. Typical conditions span roughly 100–1500 °C for seconds to several hours, in air, inert or reducing gas, or vacuum; the outcome depends on temperature, time and heating rate, and also on the earlier thermal and mechanical treatment of the sample [5]. Because grain growth is thermally activated and largely irreversible, excessive annealing coarsens the microstructure and lowers strength, so the temperature-time window is usually chosen as a compromise between defect removal and grain coarsening [2].

  • heat treatment
  • recrystallization
  • grain growth
  • defect annealing
  • rapid thermal annealing
  • crystallinity
  • microstructure

Material Science and Thermodynamics·Mechanical Engineering·Engineering·Physical Sciences

 

References

  1. Li, W.; Varlamov, S.; Dore, J.; Green, M.; Defect annealing in ultra-thin polycrystalline silicon films on glass: Rapid thermal versus laser processing. Materials Letters 2013, 107, 1-4, 10.1016/j.matlet.2013.05.107.
  2. Lee, J.S.; Prabu, A.A.; Kim, K.J.; Annealing effect upon chain orientation, crystalline morphology, and polarizability of ultra-thin P(VDF-TrFE) film for nonvolatile polymer memory device. Polymer 2010, 51, 6319-6333, 10.1016/j.polymer.2010.10.053.
  3. Wang, H.; Frontera, C.; Martínez, B.; Mestres, N.; Rapid Thermal Annealing of Double Perovskite Thin Films Formed by Polymer Assisted Deposition. Materials 2020, 13, 4966, 10.3390/ma13214966.
  4. Seo, S.; Park, J.; Annealing Heat Treatment for Homogenizing the Microstructure and Mechanical Properties of Electron-Beam-Welded Thick Plate of Ti-6Al-4V Alloy. Materials 2023, 16, 7423, 10.3390/ma16237423.
  5. Lee, D.; Jeon, H.; Deposition of SnS thin film using tetrakis(dimethylamido)tin(IV) and improvement of crystallinity by post annealing. Thin Solid Films 2025, 819, 140666, 10.1016/j.tsf.2025.140666.
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