The neural network of the human brain is composed of an estimated 86 billion neurons [1], which convey information across complex temporal patterns within the neuronal network. Deciphering the fundamental mechanisms and processes of the human mind plays an important role in recognizing human thoughts, emotions, and ultimately explains human behavior. On the other hand, the brain–computer interface (BCI), which allows direct communication between the brain’s electrical activity and an external device [2], most commonly a computer, does not rely on conventional brain information output pathways (peripheral nerve and muscle tissue) and has been widely concerned in medical, industrial, and household settings ^[3][4][3,4]. In order to realize the bidirectional interaction, it is essential for accurate acquisition and feedback of neural signals.

Activities in support of the deciphering of nervous system codes and the bidirectional interaction of BCIs rely on advanced methodologies and engineering systems at different scales [5]. Macroscopically, non-invasive methods such as electroencephalogram (EEG) ^[6][7][8][9][6,7,8,9], functional near-infrared spectroscopy (fNIRS) ^[10][11][10,11], and magnetoencephalography (MEG) ^{[12][13][14][15]}[12,13,14,15] have been widely utilized due to their high time resolution. However, to analyze the neural circuits behind cognition and behavior, it is also necessary to understand how neurons connect and communicate at the cellular and molecular levels; therefore, the ideal sensing tool must span from the single neuron to its complex network of connections [16]. Neural probes are defined as devices inserted or implanted into the brain or other nervous tissues [17] that meet the above requirements.

Electrophysiological neural probes already have mature tools at different scales; patch clamps, which can record electrical activities at a single-cell scale, are the best tool for studying ion channel activity. With the development of microelectromechanical systems (MEMS) technology, high-density Si-based microelectrode arrays (MEAs) have successfully realized the recording of high-throughput and high time resolution of brain electrical signals. However, as the size of the electrode recording site decreases, it leads to low capacitance and high impedance at the electrode/tissue interface, which seriously affects the recording resolution ^[18][19][18,19]. At the same time, the Young's modulus mismatch between traditional rigid electrode materials and soft biological tissues exacerbates the rejection of the probe invasive site, resulting in a decrease in electrode performance. Therefore, recent studies are more interested in the flexibility of neural microelectrodes, as it is expected to increase the charge storage capacity and reduce the interfacial impedance, thereby improving the signal-to-noise ratio (SNR) of electrophysiological signal detection.

In addition, many state-of-the-art neural probes for brain research have been reported over the past few decades. Among these achievements, the genetic modification of nerve cells with ion channels that are sensitive to light brought the promising new method of “optogenetics” into the neurosciences [20] with millisecond temporal resolution and single-cell spatial resolution [21]. The optoprobes embodied the theory of optogenetics through engineering design, providing a powerful tool for neuroscience research. In addition, magnetophysiology, concentrating on the magnetic field signals generated by ionic neuronal currents according to Biot–Savart law, acts as a complementary technique to electrical measurements with the advantages of non-contact, non-distortion, and no reference. The neural probe for magnetophysiology technology is to integrate micron-size magnetoresistance (MR) sensors based on spin electronics on a needle-shaped micromachined probe, named “magnetrodes” [22] in onethis review for a magnetic equivalent of electrodes. Intrusive magnetic recording of magnetrodes allows the distance from the field source to sensors to be shortened, so the amplitude of the signal (expected to be no larger than a few nT) is larger than that of MEG (hundreds of fT).

2. Microelectrodes

2.1. Rigid Microelectrodes

As one of the most mature tools for neural probes, implantable microelectrodes can accurately record electrical signals at the neuron level. For this reason, they have been widely applied to the basis of neurobiology, and have greatly promoted the development of BCI. According to the different electrode materials, microelectrodes can be divided into glass micropipette electrodes ^[23][24][25][23,24,25], metal microwire electrodes ^[26][27][28][26,27,28], and semiconductor substrate electrodes ^[29][30][31][29,30,31]. Glass micropipette electrodes, also known as patch clamps, are used to record the electrical activity of ion channels on biological membranes [32]. Compared with micropipette electrodes made of high-temperature drawn capillary glass tubes, microwire electrodes have lower high-frequency impedance, higher signal-to-noise ratio, and better mechanical properties, which can detect the fluctuation of voltage value without damaging cell activity. Microwire electrodes are the earliest implantable microelectrodes used for long-term recording of brain activity [33]. However, when the number of channels increases, the distance between the microwire electrodes cannot be precisely controlled during arrangement so that the consistency of electrode performance cannot be guaranteed, and electrode arrays assembly is also not easy to achieve [34]. With the development of photolithography and silicon etching technology, metal microwire microelectrodes are gradually replaced by silicon microelectrodes with good mechanical properties and biocompatibility. The Utah electrode ^[35][36][35,36] and Michigan electrode [37] are the two most representative types of silicon-based microelectrode arrays. For the Utah electrode array (UEA), the electrode recording point is exposed at the tip of each microneedle by mechanical cutting combined with chemical etching, and then metal is deposited [36]. The rest of the needle is insulated with polyimide to obtain a microelectrode array with precise size and spacing [38]. UEA-based BCI systems have been approved by the United States Food and Drug Administration (FDA) for some clinical trials. In 2006, Hochberg et al. [39] used implantable BCI for the first time to enable quadriplegic patients to drive computer screen cursors and activate simple robotic devices just by thinking. Over the years, the number of clinical studies and the leaps they have made in the clinical field have increased significantly. In March of this year, Chaudhary et al. [40] implanted BCI into the amyotrophic lateral sclerosis (ALS) patient who lost all muscle-based communication pathways and he selected a letter to form words and phrases to communicate his needs and experiences via auditory neurofeedback training, which also proved that brain-based volitional communication is possible even in a completely locked-in state. The UEA is not only used for recording, but also for stimulation purposes. For example, inducing tactile feedback in the hand region of the somatosensory cortex may help improve the accuracy of BCI devices [41], as well as the dexterity of prosthetics [42]. 密歇根电极阵列是一种类似于UEA的针状电极。不同的是，它在针上有多个平面记录点[43，44，45]，可以实现高密度立体声录音。2017年，Barz等人[46]将组装好的3D密歇根电极阵列长期植入非人类灵长类动物中，这些灵长类动物经过训练可以执行伸展和抓握运动任务。这一结果支持神经科学研究中特定应用神经接口的设计。

The Michigan electrode array is a needle electrode similar to UEA. The difference is that it has multiple plane recording sites on the needle ^[43][44][45], which can achieve high-density stereo recording. In 2017, Barz et al. ^[46] chronically implanted assembled 3D Michigan electrode arrays into non-human primates trained to perform a reach and grasp motor task. This result supports the design of application-specific neural interfaces in neuroscience research.

2.2. 微电极灵活性的策略

基于MEMS技术，由刚性硅制成的微电极阵列可以有效获取脑神经元的高密度活动信息。然而，硅的刚性使其无法匹配生物组织的物理性质。同时，由于其不变形的特性，在组织运动时会对细胞造成损害，因此不适合长期植入人体。因此，希望通过电极柔韧性来优化植入式电极的性能。

2.2. Strategies for Microelectrode Flexibility

神经电极的灵活性包括选择柔性聚合物作为基板，并用各种新的电极材料代替传统的金属电极。首先，具有柔性探针的电极是电极柔韧性的典型方法，通过表现出更多的适用性，提供更适合神经组织的界面;所选的柔性基板材料应具有良好的生物相容性、柔韧性以及与微细加工工艺的相容性，例如聚二甲基硅氧烷（PDMS）[47，48，49]、聚酰亚胺（PI）[50，51]、聚对二甲苯[52，53]和SU-8 [54]。此外，探针的几何形状也会影响电极附近局部组织的排斥。Wu等人设计了一种鱼骨形聚酰亚胺神经电极，通过增加电极和探针之间的距离，有效地减少了组织反应[55]。 另一方面，通过具有高电荷注入能力和优异电化学性能的各种类型的有机电活性电极材料可以进一步提高电极性能，其中包括碳基纳米材料，即碳纳米管（CNT）[56，57，58]，石墨烯[59，60，61]和导电聚合物（CPs）[62，63，64].此外，上述材料的纳米复合材料也已成为流行的选择。例如，将导电聚合物聚（3，4-乙烯二氧噻吩）（PEDOT）与具有高机械硬度的碳基纳米材料相结合，可以防止PEDOT薄膜在长期操作后变形和开裂[65]。最近，Vajrala等[66]通过简单且可重现的电沉积方法制备了高孔且坚固的PEDOT-CNF的新型纳米复合材料，实验结果表明其性能优于纯PEDOT材料。

Based on MEMS technology, microelectrode arrays made of rigid silicon can effectively obtain high-density activity information of brain neurons. Nevertheless, the rigidity of silicon makes it unable to match the physical properties of biological tissues. At the same time, because of its non-deformable characteristics, it will cause damage to cells when the tissue moves, so it is not suitable for long-term implantation in the human body. Therefore, it is desirable to optimize the performance of implantable electrodes through electrode flexibility.

2.3. 柔性微电极插入方法

The flexibility of neural electrodes includes choosing flexible polymers as substrates and replacing traditional metal electrodes with various new electrode materials. Firstly, an electrode with flexible probes is a typical method for electrode flexibility, providing an interface more suitable for neural tissue by exhibiting more suitability. The selected flexible substrate materials should have good biocompatibility, flexibility, and compatibility with the microfabrication processes, such as polydimethylsiloxane (PDMS) ^[47][48][49], polyimide (PI) ^[50][51], Parylene ^[52][53], and SU-8 ^[54]. Additionally, the geometry of the probe can also affect the rejection of the local tissue near the electrode.Wu et al. designed a fishbone-shaped polyimide neural electrode that effectively reduced the tissue reaction by increasing the distance between the electrode and the probe ^[55].

On the other hand, electrode performance can be further improved by various types of organic electroactive electrode materials with high charge injection capability and excellent electrochemical performance, which includes carbon-based nanomaterials, i.e., carbon nanotubes (CNTs) ^[56][57][58], graphene ^[59][60][61], and conductive polymers (CPs) ^[62][63][64]. Further, nanocomposites of the above materials have also become popular choices. For example, combining conducting polymer Poly (3,4-ethylenedioxythiophene) (PEDOT) with carbon-based nanomaterials with high mechanical hardness can prevent PEDOT films from deforming and cracking after long-term operation ^[65]. Recently, Vajrala et al. ^[66] fabricated novel nanocomposites of highly porous and robust PEDOT-CNF by a simple and reproducible electrodeposition method, and the experimental results showed that it has superior performance to pure PEDOT materials.

2.3. Methods of Flexible Microelectrode Insertion

Some studies have confirmed that flexible electrodes can indeed reduce the impact on the surrounding brain tissue ^[67]. However, an important problem is that flexible neural probes may be too soft to penetrate the meninges and reach the target site, thus requiring the use of additional stiffening structures. The method of stiff backbone layers ^[68] and insertion shuttles ^[69][70][71] can improve the rigidity of flexible probes, but the former will limit the flexibility of the device, and the latter will temporarily increase the footprint of the implant, causing additional damage to the nerve tissue during the implantation process. A more acceptable approach is to temporarily reinforce the probe with a bioresorbable coating, which restores the flexibility of the probe after the coating dissolves. Commonly used bioabsorbable coatings include poly (ethylene glycol) (PEG) ^[72], poly (lactic-co-glycolic acid) (PLGA) ^[73], silk fibroin ^[74], sucrose ^[75], maltose ^[76], dextran ^[77], and their bilayer structures ^[78][79]. More than just an insertion aid, these polymers act as biofriendly coatings to mitigate rejection. In actual use, the appropriate bio-coating should be selected according to the application scenario, combined with the stiffness, degradation rate, and bioresorbability of the polymer ^[80].

一些研究证实，柔性电极确实可以减少对周围脑组织的影响[67]。然而，一个重要的问题是柔性神经探针可能太软而无法穿透脑膜并到达目标部位，因此需要使用额外的加固结构。刚性骨架层[68]和插入梭[69，70，71]的方法可以提高柔性探头的刚性，但前者会限制装置的灵活性，后者会暂时增加植入物的占地面积，在植入过程中对神经组织造成额外的损伤。一种更可接受的方法是用生物可吸收涂层暂时加固探针，这在涂层溶解后恢复探针的柔韧性。常用的生物可吸收涂层包括聚乙二醇（PEG）[72]、聚乳酸共乙醇酸（PLGA）[73]、丝素蛋白[74]、蔗糖[75]、麦芽糖[76]、葡聚糖[77]及其双层结构[78，79]。这些聚合物不仅仅是一种插入助剂，还可以作为生物友好型涂层来减少剔除。在实际使用中，应结合聚合物的刚度、降解速率和生物吸收性，根据应用场景选择合适的生物涂层[80]。