Energy-dispersive X-ray spectroscopy (EDS, also EDX or EDAX) is an analytical microanalysis technique used for the elemental characterization of a sample. When a focused beam of high-energy electrons is directed at a specimen — typically within a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA) — inner-shell ionization of the atoms in the interaction volume produces characteristic X-rays whose photon energies are element-specific [1]. An energy-dispersive spectrometer, usually a cooled silicon drift detector or Si(Li) detector, records the emitted X-rays by energy simultaneously, producing a spectrum in which peak energies identify the elements present and peak areas quantify their concentrations [2]. The technique is conventionally applied to elements heavier than sodium (Z ≥ 11), although modern detectors extend routine light-element detection to beryllium [3]. EDS is distinguished from wavelength-dispersive X-ray spectroscopy (WDS) by its parallel acquisition of the full X-ray energy spectrum, shorter acquisition time, and generally lower energy resolution; quantitative analysis requires correction for atomic number effects, absorption, and secondary fluorescence, as specified in ASTM E1508 [3].
- energy‑dispersive X‑ray spectroscopy
- characteristic X‑ray
- elemental microanalysis
- solid‑state X‑ray detector
X-ray Spectroscopy and Fluorescence Analysis • Radiation • Physics and Astronomy • Physical Sciences
References
- Goldstein, J.I.; Newbury, D.E.; Michael, J.R.; Ritchie, N.W.M.; Scott, J.H.J.; Joy, D.C. Scanning Electron Microscopy and X-Ray Microanalysis, 4th ed.; Springer: New York, NY, USA, 2018. [CrossRef]Goldstein, J.I.; Newbury, D.E.; Michael, J.R.; Ritchie, N.W.M.; Scott, J.H.J.; Joy, D.C. . Scanning Electron Microscopy and X-Ray Microanalysis, 4th ed.; Springer: New York, NY, USA, 2018.
- Reed, S.J.B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology, 2nd ed.; Cambridge University Press: Cambridge, UK, 2005. [CrossRef]Reed, S.J.B. . Electron Microprobe Analysis and Scanning Electron Microscopy in Geology, 2nd ed.; Cambridge University Press: Cambridge, UK, 2005.
- ASTM International. Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy; ASTM E1508-12a(2019); ASTM International: West Conshohocken, PA, 2019.ASTM International. Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy; ASTM E1508-12a(2019); ASTM International: West Conshohocken, PA, 2019