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1 The thermal activation effect on the stoichiometry of IZO TFTs in different oxygen pressure (pure Ar and Ar/O2 flow ratio 40/2) were investigated as a function of annealing temperature and ambient related to the change in the atomic arrangement. Hyun Jae Kim + 309 word(s) 840 2020-01-15 07:12:04 2020-01-15 08:48:06